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C3F8
公司: 元佳宇有限公司
全部產品:9  筆   單價:請詢價
點閱:430   產品狀態:新品
電話:07-6218118
地址:高雄市岡山區前峰路286巷8號
HALOCARBON 218 (C3F8)
Perfluoropropane / Octafluoropropane
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Application

Halocarbon 218 is used for a chamber cleaning gas for semiconductor industry. C3F8 is used for the replacement of conventional chamber cleaning gas such as C2F6. The product was developed and commercialized in semi application by 3M.


Production Specification

Purity: 99.99%
Air < 80 ppmv
Other Organics < 10 ppmv
Acidity < 0.1 ppmv
H2O < 1 ppmw
Non-Volatile Residue <1 ppmw

Package
Cylinder
8L ~ 50L Steel Seamless Cylinder
1000L Steel Cylinder
Valve
Standard CGA valve
DISS valve
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