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C4F8
公司: 元佳宇有限公司
全部產品:9  筆   單價:請詢價
點閱:502   產品狀態:新品
電話:07-6218118
地址:高雄市岡山區前峰路286巷8號
HALOCARBON c318 (C4F8)
Octafluorocyclobutane

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Application
Halocarbon c318 is used for a chamber cleaning gas for semiconductor industry. C4F8 is used for the replacement of conventional chamber cleaning gas such as C2F6. It is also used as etching gas in semiconductor and DRAM processes.

Production Specification
Purity       
99.999%       99.995%
N2                     3                   8
O2                     1                   2
OHC                 4                   10
HF                   0.1                0.1
H2O                  1                   1
*Unit: ppm

Package
Cylinder
8L ~ 50L Steel Seamless Cylinder
1000L Steel Cylinder

Valve

Standard CGA valve
DISS valve


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