Cassette 光學自動檢測系統

『光學自動檢測系統』可提供晶圓廠檢測晶圓盒的各項重點尺寸，避免因為晶圓盒變形產生不必要的損失。

光學自動檢測系統

Cassette 光學自動檢測系統

產品名稱：Cassette 光學自動檢測系統

精準量測晶舟、晶圓等相關用途

『光學自動檢測系統』可提供晶圓廠檢測晶圓盒的各項重點尺寸，避免因為晶圓盒變形產生不必要的損失。
1.中勤獨家軟體影像辨識技術，檢測人工無法量測尺寸
2.搭配高速、高解析度工業相機，使用非接觸式技術，檢查晶圓位置尺寸，並符合半導體規範
3.設計符合2”~12”晶圓盒通用機型

AOMS(Auto-Optical Measurement System)
The AOMS(Auto-Optical Measurement System) is a dedicated wafer carrier measurement system designed tomanage dimensional accuracy. It provides all dimensional measurements required for wafer carrier fabrication, including control of deformation due to again of wafers and of wafer carriers.
(1)Detects hard-to-see edges using Chung King’s unique imageprocessing technologies.
(2)Incorporates high definition camera that provides quick non-contact focusing, even on the edge of the peripheries of the wafer, to measure SEMI-standard dimensions with excellent accuracy and at high speed.
(3)Designed for 300mm, 200mm, 150mm , 125mm , 100mm, 75mm, 50mm wafer carriers.